A NEW CORRELATION METHOD FOR IMPROVEMENT IN SELECTIVITY OF BULK TRAP MEASUREMENTS FROM CAPACITANCE AND VOLTAGE TRANSIENTS

被引：30

作者：

DMOWSKI, K

机构：

[1] Institute of Microelectronics and Optoelectronics, Technical University of Warsaw, 00-662 Warsaw

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1990年 / 61卷 / 04期

关键词：

D O I：

10.1063/1.1141180

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A new correlation method for improvement in the selectivity of bulk trap measurements from both capacitance and voltage transients is proposed. It relies on using, for deep-level transient spectroscopy, one of the new weighting functions instead of a weighting function originally proposed by Lang. The proposed method is an extension of Lang's DLTS method. Analytical expressions for correlation signals are derived. Finally, a comparative analysis of results obtained for the proposed method with those obtained for Lang's method and the method utilizing an exponential weighting function is made.

引用

页码：1319 / 1325

页数：7

共 37 条

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