THERMAL AND ELECTRON-BEAM-INDUCED REACTION OF DISILANE ON SI(100)-(2X1)

被引：75
|
作者：
BOZSO, F
AVOURIS, P
机构：
来源：
PHYSICAL REVIEW B | 1988年 / 38卷 / 06期
关键词：
D O I：
10.1103/PhysRevB.38.3943
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：3943 / 3947
页数：5
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