THERMAL AND ELECTRON-BEAM-INDUCED REACTION OF DISILANE ON SI(100)-(2X1)

被引：75

作者：

BOZSO, F

AVOURIS, P

机构：

来源：

PHYSICAL REVIEW B | 1988年 / 38卷 / 06期

关键词：

D O I：

10.1103/PhysRevB.38.3943

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：3943 / 3947

页数：5

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