CALCULATION OF DEPTH DISTRIBUTION-FUNCTIONS FOR CHARACTERISTIC X-RADIATION USING AN ELECTRON-SCATTERING MODEL .2. RESULTS

Results obtained from the model of multiple electron reflection are compared with experimental data and values calculated using analytical expressions commonly used in electron probe microanalysis. It is shown that the proposed model quantifies the total amount of generated x-ray intensity very accurately, the root mean square error obtained from comparison with Pouchou and Pichoir's results being 2.33%. The shape of the depth distribution functions is also predicted very well, as is illustrated by a comprehensive comparison with measured data and with curves obtained from the expressions of Bastin and Heijligers and of Pouchou and Pichoir. Characteristics of the calculated curves and experimental errors affecting the shape of measured depth distribution functions are discussed.