GRAPHICAL REPRESENTATION OF THE PIEZORESISTANCE COEFFICIENTS IN SILICON-SHEAR COEFFICIENTS IN PLANE

被引：41
作者：
KANDA, Y
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 07期
关键词：
D O I：
10.1143/JJAP.26.1031
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：1031 / 1033
页数：3
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