HIGHLY TRANSPARENT AND CONDUCTING ZINC-OXIDE FILMS DEPOSITED BY ACTIVATED REACTIVE EVAPORATION

被引：34
作者：
LAU, WS
FONASH, SJ
机构：
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1987年 / 16卷 / 03期
关键词：
D O I：
10.1007/BF02655478
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：141 / 149
页数：9
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