HIGHLY TRANSPARENT AND CONDUCTING ZINC-OXIDE FILMS DEPOSITED BY ACTIVATED REACTIVE EVAPORATION

被引：34

作者：

LAU, WS

FONASH, SJ

机构：

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1987年 / 16卷 / 03期

关键词：

D O I：

10.1007/BF02655478

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：141 / 149

页数：9

相关论文

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