SUPERPOSITION OF AUGER-ELECTRON SPECTROSCOPY DEPTH PROFILES OBTAINED ON CR/NI MULTILAYER SAMPLES WITH DIFFERENT ROUGHNESSES

被引：12

作者：

ZALAR, A ^{[1
]}

HOFMANN, S ^{[1
]}

机构：

[1] MAX PLANCK INST MET RES, INST WERKSTOFFWISSENSCH, D-7000 STUTTGART 80, GERMANY

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574642

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1209 / 1212

页数：4

共 16 条

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[2] DEPTH RESOLUTION AND SURFACE-ROUGHNESS EFFECTS IN SPUTTER PROFILING OF NICR MULTILAYER SANDWICH SAMPLES USING AUGER-ELECTRON SPECTROSCOPY
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[3] Hofmann S., 1980, Surface and Interface Analysis, V2, P148, DOI 10.1002/sia.740020406
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[5] DEPTH RESOLUTION IMPROVEMENT IN AES SPUTTER PROFILING OF NI/CR MULTILAYERS ON ROUGH SUBSTRATES USING 2 ION-BEAMS
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[J]. SURFACE AND INTERFACE ANALYSIS, 1987, 10 (01) : 7 - 12
[6] ION SPUTTERING IN THE SURFACE-ANALYSIS OF PRACTICAL SURFACES
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[J]. SURFACE AND INTERFACE ANALYSIS, 1983, 5 (02) : 64 - 70
[7] INFLUENCE OF ION-BOMBARDMENT ON DEPTH RESOLUTION IN AUGER-ELECTRON SPECTROSCOPY ANALYSIS OF THIN GOLD-FILMS ON NICKEL
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[8] MATHIEU HJ, 1978, J MICROSC SPECT ELEC, V3, P113
[9] MATHIEU HJ, 1984, TOP CURR PHYS, V37, P39
[10] DEPTH RESOLUTION IN COMPOSITION PROFILES BY ION SPUTTERING AND SURFACE-ANALYSIS FOR SINGLE-LAYER AND MULTILAYER STRUCTURES ON REAL SUBSTRATES
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LEA, C
[J]. THIN SOLID FILMS, 1981, 81 (03) : 257 - 270

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