SIZE EFFECT ON CONTACT RESISTANCE AND DEVICE SCALING

被引：17

作者：

COHEN, SS

GILDENBLAT, G

BROWN, DM

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 04期

关键词：

D O I：

10.1149/1.2119873

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：978 / 980

页数：3

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