POLARIMETRY OF TRANSMISSION GRATINGS

被引:10
作者
LOCHBIHLER, H
POLNAU, E
PREDEHL, P
机构
[1] Extraterrestrische Physik, Max-Planck-Institut, Garching bei München
来源
APPLIED OPTICS | 1995年 / 34卷 / 25期
关键词
POLARIZATION; TRANSMISSION GRATINGS; WIRE GRATINGS;
D O I
10.1364/AO.34.005725
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We have investigated the polarizing properties of gold wire gratings in the resonance domain. The partial polarizing properties of 1-mu m period gratings in the near IR are then used to orient the wire structure of transmission grating facets parallel to each other by means of an alignment polarimeter technique. The absolute alignment accuracy for these gratings is limited by the influence of the support structure on the orientation of the polarization ellipse. If the polarizing properties of this perturbative component are known, the accuracy can be enhanced by treating the polarization by means of the Mueller calculus.
引用
收藏
页码:5725 / 5731
页数:7
相关论文
共 22 条
[1]   TRANSMISSION-X-RAY DIFFRACTION GRATING ALIGNMENT USING A PHOTOELASTIC MODULATOR [J].
ANDERSON, EH ;
LEVINE, AM ;
SCHATTENBURG, ML .
APPLIED OPTICS, 1988, 27 (16) :3522-3525
[2]   WAVELENGTH-SCANNING POLARIZATION-MODULATION ELLIPSOMETRY - SOME PRACTICAL CONSIDERATIONS [J].
BERMUDEZ, VM ;
RITZ, VH .
APPLIED OPTICS, 1978, 17 (04) :542-552
[3]   THE WIRE GRID AS A NEAR-INFRARED POLARIZER [J].
BIRD, GR ;
PARRISH, M .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1960, 50 (09) :886-891
[4]   TRANSMISSION COEFFICIENTS OF FREESTANDING WIRE GRIDS IN THE FAR INFRARED - A THEORETICAL APPROACH FOR EASY COMPUTATION [J].
BLANCO, A ;
FONTI, S ;
PIACENTE, A .
INFRARED PHYSICS, 1986, 26 (06) :357-363
[5]  
BRAUNINGER H, 1979, APPL OPTICS, V18, P3502, DOI 10.1364/AO.18.003502
[6]  
Clarke D., 1971, POLARIZED LIGHT OPTI
[7]   HOLOGRAPHIC CONSTRUCTION OF OPEN STRUCTURE, DISPERSION TRANSMISSION GRATINGS [J].
DIJKSTRA, JH ;
LANTWAARD, LJ .
OPTICS COMMUNICATIONS, 1975, 15 (02) :300-305
[8]   APPLICATION OF ALMOST-EQUAL-TO 100 A LINEWIDTH STRUCTURES FABRICATED BY SHADOWING TECHNIQUES [J].
FLANDERS, DC ;
WHITE, AE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :892-896
[9]   EFFECTIVE-MEDIUM THEORY OF ZEROTH-ORDER LAMELLAR GRATINGS IN CONICAL MOUNTINGS [J].
HAGGANS, CW ;
LI, LF ;
KOSTUK, RK .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1993, 10 (10) :2217-2225
[10]   RECENT DEVELOPMENTS IN INSTRUMENTATION IN ELLIPSOMETRY [J].
HAUGE, PS .
SURFACE SCIENCE, 1980, 96 (1-3) :108-140