PROPERTIES OF RAPIDLY DEPOSITED AMORPHOUS HYDROGENATED CARBON-FILMS

被引：3

作者：

NAKAMURA, Y

YAMAGUCHI, Y

WATANABE, Y

HIRAYAMA, S

机构：

[1] Department of Materials Science and Engineering, National Defense Academy, Kanagawa, 239, 1-10-20 Hashirimizu, Yokosuka

来源：

JOURNAL OF MATERIALS SCIENCE | 1992年 / 27卷 / 23期

关键词：

D O I：

10.1007/BF00576295

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The properties of hydrogenated amorphous carbon films prepared by the rapid and low-temperature decomposition of toluene in an r.f. glow discharge have been investigated. The films are composed of a mixture of sp2 and sp3 bonded carbons. Measurements of the optical gap show that the optical gap decreases with an increase of the r.f. power and increases with increasing pressure. The room-temperature dielectric constant decreases with increasing pressure with a dielectric loss tangent of 1%.

引用

页码：6437 / 6439

页数：3

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