共 50 条
- [1] SHALLOW JUNCTIONS BY ION-IMPLANTATION AND RAPID THERMAL ANNEALING NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 348 - 358
- [3] RAPID THERMAL ANNEALING AND ION-IMPLANTATION OF HETEROEPITAXIAL ZNSE/GAAS ADVANCES IN MATERIALS, PROCESSING AND DEVICES IN III-V COMPOUND SEMICONDUCTORS, 1989, 144 : 391 - 396
- [4] ION-IMPLANTATION DAMAGE AND ANNEALING IN GASB NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 : 532 - 537
- [7] DAMAGE FORMATION AND ANNEALING OF ION-IMPLANTATION IN SI MATERIALS SCIENCE REPORTS, 1991, 6 (4-5): : 141 - 214