THERMAL-OXIDATION OF SPUTTER-COATED REACTION-BONDED SILICON-NITRIDE

被引：19

作者：

GREGORY, OJ

RICHMAN, MH

机构：

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 1984年 / 67卷 / 05期

关键词：

D O I：

10.1111/j.1151-2916.1984.tb19533.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：335 / 340

页数：6

共 23 条

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[8] PYROLYTIC SI3N4 [J].

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[9] REACTIVE SPUTTER-COATED REACTION-BONDED SILICON-NITRIDE [J].

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[10]

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