INFLUENCE OF HEAT-TREATMENT ON SI-SIO2 INTERFACE STATES IN POLY SI-SIO2-SI SYSTEM

被引:0
|
作者
HASEGAWA, K [1 ]
MORITA, H [1 ]
ENOMOTO, T [1 ]
FUKUWATARI, H [1 ]
机构
[1] MITSUBISHI ELECT CORP, KITA WORKS, 4-1 MIZUHARA, ITAMI, HYOGO, JAPAN
关键词
D O I
暂无
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:C89 / C89
页数:1
相关论文
共 50 条
  • [41] THE INFLUENCE OF MOBILE IONS ON THE SI-SIO2 INTERFACE TRAPS
    HILLEN, MW
    HEMMES, DG
    SOLID-STATE ELECTRONICS, 1981, 24 (08) : 773 - 780
  • [42] INDIVIDUAL DEFECTS AT THE SI-SIO2 INTERFACE
    KIRTON, MJ
    UREN, MJ
    COLLINS, S
    SCHULZ, M
    KARMANN, A
    SCHEFFER, K
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1989, 4 (12) : 1116 - 1126
  • [43] MODELS OF SI-SIO2 INTERFACE REACTIONS
    REED, ML
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1989, 4 (12) : 980 - 985
  • [44] ELECTRONIC PROPERTIES OF SI-SIO2 INTERFACE
    CIRACI, S
    BATRA, IP
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1977, 22 (03): : 293 - 294
  • [45] VACUUM ANNEALED SI-SIO2 INTERFACE
    BROWN, DM
    GRAY, PV
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (12) : C316 - &
  • [46] SI-SIO2 INTERFACE CHARACTERIZATION BY ESCA
    ISHIZAKA, A
    IWATA, S
    KAMIGAKI, Y
    SURFACE SCIENCE, 1979, 84 (02) : 355 - 374
  • [47] Mechanical stresses on the Si-SiO2 interface
    Sokolov, V.I.
    Fedorovich, N.A.
    Physica Status Solidi (A) Applied Research, 1987, 99 (01): : 151 - 158
  • [48] STRUCTURAL FEATURES AT THE SI-SIO2 INTERFACE
    BROWER, KL
    ZEITSCHRIFT FUR PHYSIKALISCHE CHEMIE NEUE FOLGE, 1987, 151 : 177 - 189
  • [49] AMPHOTERIC DEFECTS AT THE SI-SIO2 INTERFACE
    CHANG, ST
    WU, JK
    LYON, SA
    APPLIED PHYSICS LETTERS, 1986, 48 (10) : 662 - 664
  • [50] The precipitation of Fe at the Si-SiO2 interface
    Wong-Leung, J
    Eaglesham, DJ
    Sapjeta, J
    Jacobson, DC
    Poate, JM
    Williams, JS
    JOURNAL OF APPLIED PHYSICS, 1998, 83 (01) : 580 - 584