EFFECT OF PROCESSING CONDITIONS ON THE STRUCTURE OF DENSE AL2O3 FILMS

被引：0

作者：

YAKOVLEVA, NM

YAKOVLEV, AN

CHUPAKHINA, EA

机构：

来源：

INORGANIC MATERIALS | 1994年 / 30卷 / 11期

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D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1332 / 1335

页数：4

共 17 条

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