DECOMPOSITION MECHANISMS OF TRIMETHYLGALLIUM

被引:99
作者
LARSEN, CA [1 ]
BUCHAN, NI [1 ]
LI, SH [1 ]
STRINGFELLOW, GB [1 ]
机构
[1] UNIV UTAH,DEPT MAT SCI & ENGN,SALT LAKE CITY,UT 84112
关键词
D O I
10.1016/0022-0248(90)90891-N
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The thermal decomposition of trimethylgallium (TMGa) has been studied in a variety of carrier gases, using a time-of-flight mass spectrometer to analyze the products and obtain kinetic information. N2 and He give almost identical pyrolysis curves. Addition of toluene in He shifts the decomposition to higher temperatures; thus methyl radical attack on the parent TMGa is important in the inert carriers. H2 and D2 accelerate the reaction compared to N2. Addition of a small amount of CH3 radicals from trimethylindium pyrolysis lowers the pyrolysis temperature significantly, indicating a chain reaction. The products of a D2/toluene mixture show that the active species are the H or D atoms rather than CH3 radicals. These data show that the major reactions involved in TMGa decomposition in N2 or He are (CH3)3Ga → CH3 + (CH3)2Ga and CH3 + (CH3)3Ga → CH4 + CH2Ga(CH3)2. In H2 a chain reaction takes place: CH3 + H2 → CH4 + H and H + (CH3)3Ga → CH4 + CH3 + CH3Ga. Numerical modeling was used to test these proposals. By this means it was determined that in addition to the reactions above, a key reaction is decomposition of CH2Ga(CH3)2 to give CH2GaCH3 + CH3. As with other main group organometallics, the entire decomposition mechanism is complex. © 1990.
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页码:103 / 116
页数:14
相关论文
共 44 条
[1]   THE PHOTOLYSIS OF CADMIUM DIMETHYL [J].
ANDERSON, RD ;
TAYLOR, HA .
JOURNAL OF PHYSICAL CHEMISTRY, 1952, 56 (04) :498-502
[2]  
ASPNES DE, 1989, I PHYS C SER, V96, P283
[3]  
Benson, 1976, THERMOCHEMICAL KINET, V23, P613
[4]   AN APPARENT ISOTOPE ANOMALY IN THE REACTION CH3 + H/D [J].
BROUARD, M ;
PILLING, MJ .
CHEMICAL PHYSICS LETTERS, 1986, 129 (05) :439-445
[5]   MASS-SPECTROMETRIC STUDIES OF TRIMETHYLINDIUM PYROLYSIS [J].
BUCHAN, NI ;
LARSEN, CA ;
STRINGFELLOW, GB .
JOURNAL OF CRYSTAL GROWTH, 1988, 92 (3-4) :591-604
[6]   INSITU, REAL-TIME DIAGNOSTICS OF OMVPE USING IR-DIODE LASER SPECTROSCOPY [J].
BUTLER, JE ;
BOTTKA, N ;
SILLMON, RS ;
GASKILL, DK .
JOURNAL OF CRYSTAL GROWTH, 1986, 77 (1-3) :163-171
[7]   THE PYROLYSIS OF MERCURY DIMETHYL .3. THE EFFECT OF ADDED NITROGEN, ETHANE AND AZOMETHANE [J].
CATTANACH, J ;
LONG, LH .
TRANSACTIONS OF THE FARADAY SOCIETY, 1960, 56 (09) :1286-1295
[8]   THERMAL-DECOMPOSITION OF METHANE .1. KINETICS OF PRIMARY DECOMPOSITION TO C2H6 + H2 - RATE CONSTANT FOR HOMOGENEOUS UNIMOLECULAR DISSOCIATION OF METHANE AND ITS PRESSURE-DEPENDENCE [J].
CHEN, CJ ;
BACK, MH ;
BACK, RA .
CANADIAN JOURNAL OF CHEMISTRY-REVUE CANADIENNE DE CHIMIE, 1975, 53 (23) :3580-3590
[9]   ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION OF III/V COMPOUND SEMICONDUCTORS WITH NOVEL ORGANOMETALLIC PRECURSORS [J].
COWLEY, AH ;
BENAC, BL ;
EKERDT, JG ;
JONES, RA ;
KIDD, KB ;
LEE, JY ;
MILLER, JE .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1988, 110 (18) :6248-6249
[10]   The decomposition of mercury dimethyl [J].
Cunningham, JP ;
Taylor, HS .
JOURNAL OF CHEMICAL PHYSICS, 1938, 6 (07) :359-367