INFLUENCE OF PULSED LASER IRRADIATION ON THE PROPERTIES OF IMPLANTED LAYERS OF SILICON-CARBIDE

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作者：

VIOLIN, EE

VORONKO, ON

NOIBERT, F

POTAPOV, EN

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SOVIET PHYSICS SEMICONDUCTORS-USSR | 1984年 / 18卷 / 05期

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O469 [凝聚态物理学];

学科分类号：

070205 ;

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页码：596 / 597

页数：2

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