INFLUENCE OF PULSED LASER IRRADIATION ON THE PROPERTIES OF IMPLANTED LAYERS OF SILICON-CARBIDE

被引：0
作者：
VIOLIN, EE
VORONKO, ON
NOIBERT, F
POTAPOV, EN
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SOVIET PHYSICS SEMICONDUCTORS-USSR | 1984年 / 18卷 / 05期
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O469 [凝聚态物理学];
学科分类号：
070205 ;
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页码：596 / 597
页数：2
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