OXIDATIVE REMOVAL OF PHOTORESIST BY OXYGEN FREON-116 DISCHARGE PRODUCTS

被引：37

作者：

HANNON, JJ

COOK, JM

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 05期

关键词：

D O I：

10.1149/1.2115771

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1164 / 1169

页数：6

共 18 条

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