A STUDY OF GAAS ETCHING IN ALKALINE H2O2 SOLUTIONS

被引：37

作者：

KELLY, JJ ^{[1
]}

REYNDERS, AC ^{[1
]}

机构：

[1] PHILIPS RES LABS, 5600 JA EINDHOVEN, NETHERLANDS

来源：

APPLIED SURFACE SCIENCE | 1987年 / 29卷 / 02期

关键词：

D O I：

10.1016/0169-4332(87)90001-8

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：149 / 164

页数：16

共 24 条

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