EXACT SOLUTION OF THE PROXIMITY EFFECT EQUATION BY A SPLITTING METHOD

被引：11
作者：
GERBER, PD
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 01期
关键词：
D O I：
10.1116/1.583969
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：432 / 435
页数：4
相关论文
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[2]  
JOHN F, 1971, APPLIED MATH SCI, V1, P170
[3]   PROXIMITY EFFECTS IN ELECTRON LITHOGRAPHY - MAGNITUDE AND CORRECTION TECHNIQUES [J].
PARIKH, M .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1980, 24 (04) :438-457
[4]   PROXIMITY EFFECT CORRECTION CALCULATIONS BY THE INTEGRAL-EQUATION APPROXIMATE SOLUTION METHOD [J].
PAVKOVICH, JM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01) :159-163
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