CHARGE TRANSPORT THROUGH LAYERS OF THERMALLY NITRIDED SIO2

被引：2
|
作者：
EFIMOV, VM
ESAEV, DG
MEERSON, EE
LOGVINSKII, LM
PEROV, GN
机构：
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1986年 / 98卷 / 01期
关键词：
D O I：
10.1002/pssa.2210980137
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：319 / 327
页数：9
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