SENSITIVE, NONINTRUSIVE, INSITU MEASUREMENT OF TEMPORALLY AND SPATIALLY RESOLVED PLASMA ELECTRIC-FIELDS

被引:141
作者
MOORE, CA [1 ]
DAVIS, GP [1 ]
GOTTSCHO, RA [1 ]
机构
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
关键词
D O I
10.1103/PhysRevLett.52.538
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:538 / 541
页数:4
相关论文
共 13 条
[1]   COMPENSATED POLARIZATION SCRAMBLER FOR RAMAN DEPOLARIZATION AND INTENSITY MEASUREMENTS ON MICROSAMPLES [J].
BAILEY, GF ;
SCHERER, JR .
SPECTROSCOPY LETTERS, 1969, 2 (09) :261-&
[2]  
Gottscho R. A., 1983, Plasma Chemistry and Plasma Processing, V3, P193, DOI 10.1007/BF00566020
[3]   CARBON-TETRACHLORIDE PLASMA-ETCHING OF GAAS AND INP - A KINETIC-STUDY UTILIZING NONPERTURBATIVE OPTICAL TECHNIQUES [J].
GOTTSCHO, RA ;
SMOLINSKY, G ;
BURTON, RH .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (08) :5908-5919
[4]   LASER-INDUCED FLUORESCENCE DIAGNOSTICS OF GLOW-DISCHARGES - SPATIALLY RESOLVED CONCENTRATION PROFILES [J].
GOTTSCHO, RA ;
DAVIS, GP ;
BURTON, RH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :622-624
[5]  
GOTTSCHO RA, UNPUB
[6]  
Herzberg G., 1950, SPECTRA DIATOMIC MOL, V1
[7]  
Herzberg G, 1941, CAN J RES A, V19, P127
[8]  
Hougen J.T., 1970, NATL BUR STAND MONOG, V115
[9]  
HOUGEN JT, 1975, J MOL SPECTROSC, V55, P500
[10]   SCRAMBLER PLATES USED TO DEPOLARIZE VISIBLE RADIATION [J].
RAHN, LJ ;
TEMPLE, PA ;
HATHAWAY, CE .
APPLIED SPECTROSCOPY, 1971, 25 (06) :675-&