FABRICATION OF ULTRAFINE SNO2 THIN-FILMS BY THE HYDROTHERMAL METHOD

被引：31

作者：

CHEN, QW

QIAN, YT

CHEN, ZY

ZHOU, GE

ZHANG, YH

机构：

[1] UNIV SCI & TECHNOL CHINA,ACAD SINICA,STRUCT RES LAB,HEFEI 230026,PEOPLES R CHINA

[2] CTR ADV STUDIES SCI & TECHNOL MICROSTRUCT,NANJING 210093,PEOPLES R CHINA

来源：

THIN SOLID FILMS | 1995年 / 264卷 / 01期

关键词：

DEPOSITION PROCESS; NANOSTRUCTURES; SURFACE TENSION; TIN OXIDE;

D O I：

10.1016/0040-6090(95)06586-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ultrafine SnO2 thin films have been prepared by the hydrothermal method. Pretreatment at a lower temperature (60-100 degrees C) was found to be necessary for SnO2 nuclei on the Si(100) substrate. The X-ray diffraction pattern showed that the films with an average particle size of 3.5 nm were polycrystalline. The scanning electron micrograph of the cross-section showed a homogeneous layer of 0.2 mu m film formed on the substrate. X-ray photoelectron spectroscopy and gas-sensitivity properties of the film were also investigated.

引用

页码：25 / 27

页数：3

共 20 条

[1] ELECTROCHEMICAL, HYDROTHERMAL, AND ELECTROCHEMICAL-HYDROTHERMAL SYNTHESIS OF BARIUM-TITANATE THIN-FILMS ON TITANIUM SUBSTRATES [J].