FABRICATION OF ULTRAFINE SNO2 THIN-FILMS BY THE HYDROTHERMAL METHOD

被引：31
作者：
CHEN, QW
QIAN, YT
CHEN, ZY
ZHOU, GE
ZHANG, YH
机构：
[1] UNIV SCI & TECHNOL CHINA,ACAD SINICA,STRUCT RES LAB,HEFEI 230026,PEOPLES R CHINA
[2] CTR ADV STUDIES SCI & TECHNOL MICROSTRUCT,NANJING 210093,PEOPLES R CHINA
来源：
THIN SOLID FILMS | 1995年 / 264卷 / 01期
关键词：
DEPOSITION PROCESS; NANOSTRUCTURES; SURFACE TENSION; TIN OXIDE;
D O I：
10.1016/0040-6090(95)06586-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Ultrafine SnO2 thin films have been prepared by the hydrothermal method. Pretreatment at a lower temperature (60-100 degrees C) was found to be necessary for SnO2 nuclei on the Si(100) substrate. The X-ray diffraction pattern showed that the films with an average particle size of 3.5 nm were polycrystalline. The scanning electron micrograph of the cross-section showed a homogeneous layer of 0.2 mu m film formed on the substrate. X-ray photoelectron spectroscopy and gas-sensitivity properties of the film were also investigated.
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页码：25 / 27
页数：3
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