[1] Fraunhofer Inst Electron Beam & Plasma Technol FE, Dresden, Germany
[2] Fraunhofer Inst Surface Engn & Thin Films IST, Braunschweig, Germany
[3] Tech Univ Carolo Wilhelmina Braunschweig, Braunschweig, Germany
[4] Fraunhofer IST, Grp Micro & Sensor Technol, Braunschweig, Germany
[5] Fraunhofer IST, Sensory Funct Coatings, Braunschweig, Germany
[6] Fraunhofer IST, Micro & Sensor Technol, Braunschweig, Germany
[7] Fraunhofer IST, Braunschweig, Germany
[8] Electroplating, Braunschweig, Germany
[9] Philips Res, Hamburg, Germany
[10] Fraunhofer IST, Dept Opt & Elect Coatings, Braunschweig, Germany