PLASMA-ETCHING WITH SURFACE MAGNETIC-FIELD CONFINEMENT

被引：23
|
作者：
MANTEI, TD
WICKER, T
机构：
来源：
APPLIED PHYSICS LETTERS | 1983年 / 43卷 / 01期
关键词：
D O I：
10.1063/1.94130
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：84 / 86
页数：3
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