SEMICONDUCTOR MANUFACTURING TECHNOLOGY AT IBM

被引：5
作者：
CARRE, H
DOXTATOR, RH
DUFFY, MC
机构：
[1] IBM CORP,E FISHKILL FACIL,DIV GEN TECHNOL,HOPEWELL JUNCTION,NY 12533
[2] IBM CORP,BURLINGTON FACIL,DIV GEN TECHNOL,ESSEX JUNCTION,VT 05452
来源：
IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1982年 / 26卷 / 05期
关键词：
Compendex;
D O I：
10.1147/rd.265.0528
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
Semiconductor device manufacture
引用
收藏
页码：528 / 531
页数：4
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