THE PYROLYSIS OF PRECURSORS FOR GAAS MOCVD STUDIED BY INSITU AND EXSITU FOURIER-TRANSFORM INFRARED-SPECTROSCOPY

被引：12
|
作者：
ARMSTRONG, SR
HOARE, RD
PEMBLE, ME [1 ]
POVEY, IM
STAFFORD, A
TAYLOR, AG
WILLIAMS, JO
机构：
[1] UNIV MANCHESTER,INST SCI & TECHNOL,DEPT CHEM,POB 88,SACKVILLE ST,MANCHESTER M60 1QD,LANCS,ENGLAND
[2] UNIV MANCHESTER,INST SCI & TECHNOL,CTR ELECTR MAT,MANCHESTER M60 1QD,LANCS,ENGLAND
[3] ADV MAT RES LAB,DEESIDE CH5 4BR,CLWYD,WALES
来源：
JOURNAL OF CRYSTAL GROWTH | 1992年 / 124卷 / 1-4期
关键词：
D O I：
10.1016/0022-0248(92)90430-Q
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
The decomposition of arsine at atmospheric pressure as studied by in-situ and ex-situ Fourier transform infrared spectroscopy (FTIR) is presented, comparing the techniques. Ex-situ spectroscopic and spectrometric evidence for the formation of methylarsine and dimethylarsine during the reaction of trimethylgallium and arsine, and in-situ spectroscopic evidence for the formation of diethylarsine during the reaction of triethylgallium and arsine is discussed. The observation of alkylarsines strongly implies a stepwise free radical reaction mechanism, however whether these processes are heterogeneous or homogeneous remains unclear.
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页码：10 / 15
页数：6
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