PROPERTIES OF PBS EPITAXIAL-FILMS GROWN BY A HOT WALL METHOD

被引:19
作者
DUH, KY [1 ]
ZEMEL, JN [1 ]
机构
[1] UNIV PENN,MOORE SCH ELECT ENGN,PHILADELPHIA,PA 19174
关键词
D O I
10.1016/0040-6090(75)90176-5
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:165 / 179
页数:15
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