STRESS-ANALYSIS AND FAILURE POSSIBILITY ASSESSMENT OF MULTILAYER PHYSICALLY VAPOR-DEPOSITED COATINGS

被引：34

作者：

LYUBIMOV, VV ^{[1
]}

VOEVODIN, AA ^{[1
]}

SPASSKY, SE ^{[1
]}

YEROKHIN, AL ^{[1
]}

机构：

[1] TULA POLYTECH INST,ELECTROPHYS & ELECTROCHEM TREATMENT LAB,TULA 300600,USSR

来源：

THIN SOLID FILMS | 1992年 / 207卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(92)90111-N

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A mathematical model for stress analysis and failure possibility assessment of multilayer coatings produced by ion-assisted physical vapour deposition (PVD) is proposed. Stresses in coating layers are divided into thermal, intrinsic and operational stresses. Calculations of thermal stresses and intrinsic stresses caused by interstitials are performed for TiN and titanium layers on stainless steel substrates. Coating failures as a result of a single layer failure, interface crack propagation and peeling above an area with imperfect adhesion are discussed. The model enables the determination of optimal thicknesses and deposition conditions of layers. X-ray diffraction stress measurements make it possible to estimate the model errors, which are found to be 15%-20%. As an example, calculations for PVD coatings with TiN and titanium layers are carried out. It is concluded that it is useful to interpose the ceramic and metal layers to reduce interface shear forces.

引用

页码：117 / 125

页数：9

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