AN EXAMINATION OF THE REACTIVE SPUTTERING OF SILICON-NITRIDE ON TO GALLIUM-ARSENIDE

被引：3
作者：
BARTLE, DC
ANDREWS, DC
GRANGE, JD
TRIGG, AD
WICKENDEN, DK
机构：
来源：
VACUUM | 1983年 / 33卷 / 07期
关键词：
D O I：
10.1016/0042-207X(83)90660-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：407 / 410
页数：4
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