16 channel 200 GHz arrayed waveguide grating based on Si nanowire waveguides

被引：3

作者：

Zhao Lei ^{[1
]}

An Junming ^{[1
]}

Zhang Jiashun ^{[1
]}

Song Shijiao ^{[1
]}

Wu Yuanda ^{[1
]}

Hu Xiongwei ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China

来源：

JOURNAL OF SEMICONDUCTORS | 2011年 / 32卷 / 02期

基金：

国家高技术研究发展计划(863计划); 中国国家自然科学基金;

关键词：

integrated optics; arrayed waveguide grating; Si nanowire waveguides;

D O I：

10.1088/1674-4926/32/2/024010

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

A 16 channel arrayed waveguide grating demultiplexer with 200 GHz channel spacing based on Si nanowire waveguides is designed. The transmission spectra response simulated by transmission function method shows that the device has channel spacing of 1.6 nm and crosstalk of 31 dB. The device is fabricated by 193 nm deep UV lithography in silicon-on-substrate. The demultiplexing characteristics are observed with crosstalk of 5-8 dB, central channel's insertion loss of 2.2 dB, free spectral range of 24.7 nm and average channel spacing of 1.475 nm. The cause of the spectral distortion is analyzed specifically.

引用

页数：4

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