A STUDY OF NUCLEATION IN CHEMICALLY GROWN EPITAXIAL SILICON FILMS USING MOLECULAR BEAM TECHNIQUES .I. EXPERIMENTAL METHODS

被引：44

作者：

JOYCE, BA

BRADLEY, RR

机构：

来源：

PHILOSOPHICAL MAGAZINE | 1966年 / 14卷 / 128期

关键词：

D O I：

10.1080/14786436608219012

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：289 / +

页数：1

共 9 条

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[4]

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[8] THEORY AND APPLICATION OF MOLECULAR-BEAM TECHNIQUES FOR THE DESIGN OF COLLISION-FREE SAMPLING SYSTEMS .1. MOLECULAR-BEAM FORMATION BY MULTIPLE APERTURE COLLIMATING SYSTEMS [J].

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[9] EPITAXIAL SILICON FILMS BY THE HYDROGEN REDUCTION OF SIC1 [J].

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