FLOW-RATE MICROSENSOR MODELING AND OPTIMIZATION USING SPICE

被引：32

作者：

SWART, NR

NATHAN, A

机构：

[1] Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, Ont.

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1992年 / 34卷 / 02期

关键词：

D O I：

10.1016/0924-4247(92)80182-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a technique for modelling flow-rate microsensors using a circuit simulator. Our approach includes a user interface which greatly simplifies the generation of the circuit data file. The approach is very cost effective, as both electrical and thermal simulations can be performed using the same simulator. It also means that all simulations can be executed in the same design environment. The results of several simulations, which illustrate the usefulness of our method for both modelling and optimization of thermal micro flow sensors, are presented.

引用

页码：109 / 122

页数：14