LASER SPUTTERING .2. THE MECHANISM OF THE SPUTTERING OF AL2O3

被引：86
作者：
ROTHENBERG, JE
KELLY, R
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1984年 / 1卷 / 2-3期
关键词：
D O I：
10.1016/0168-583X(84)90083-1
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：291 / 300
页数：10
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