LASER SPUTTERING .2. THE MECHANISM OF THE SPUTTERING OF AL2O3

被引:86
作者
ROTHENBERG, JE
KELLY, R
机构
关键词
D O I
10.1016/0168-583X(84)90083-1
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:291 / 300
页数:10
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