INTEGRATED-CIRCUIT PRODUCTION WITH ELECTRON-BEAMS

被引：9
作者：
LIVESAY, WR [1 ]
机构：
[1] RADIANT ENERGY SYST,NEWBURY PK,CA 91320
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 06期
关键词：
D O I：
10.1116/1.1318459
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1028 / 1032
页数：5
相关论文
共 50 条
[21]   INTEGRATED-CIRCUIT DEVELOPMENT [J].
BROTHERS, JS .
RADIO AND ELECTRONIC ENGINEER, 1973, 43 (1-2) :39-48
[22]   INTEGRATED-CIRCUIT TESTING [J].
BARBER, MR ;
ZACHARIAS, A .
BELL LABORATORIES RECORD, 1977, 55 (05) :124-130
[23]   A CONFIGURABLE INTEGRATED TEST METHODOLOGY FOR MONOLITHIC MICROWAVE INTEGRATED-CIRCUIT PRODUCTION [J].
WANG, H ;
YANG, DC ;
ESFANDIARI, R ;
JOSEPH, T ;
ELLIS, RK ;
NG, G .
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1992, 5 (03) :248-254
[24]   NEUTRON PRODUCTION VIA INTENSE RELATIVISTIC ELECTRON-BEAMS [J].
CLARK, JG ;
KERNS, JR ;
MCCANN, TE .
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1972, 17 (11) :1031-1031
[25]   PRODUCTION AND ACCELERATION OF IONS BY INTENSE RELATIVISTIC ELECTRON-BEAMS [J].
GRAYBILL, SE .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1972, NS19 (02) :292-&
[26]   PRODUCTION AND DYNAMICS OF HIGH-INTENSITY ELECTRON-BEAMS [J].
BOSCOLO, I ;
LEO, M ;
LUCHES, A .
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1973, 18 (02) :194-194
[27]   PRODUCTION AND DYNAMICS OF HIGH-INTENSITY ELECTRON-BEAMS [J].
BRAUTTI, G ;
BOSCOJO, I ;
COISSON, R ;
LEO, M ;
LUCHES, A ;
TEPORE, A .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1973, NS20 (03) :286-288
[28]   TRANSMISSION OF ELECTRON-BEAMS [J].
THIEK, PA .
KERNENERGIE, 1984, 27 (01) :14-18
[29]   CALIBRATION OF ELECTRON-BEAMS [J].
DEALMEIDA, CE ;
CECATTI, ER .
MEDICAL PHYSICS, 1984, 11 (03) :415-415
[30]   ELECTRON-BEAM MACHINE ADVANCES INTEGRATED-CIRCUIT FABRICATION [J].
不详 .
TELECOMMUNICATION JOURNAL, 1975, 42 (11) :659-659
12345