INTEGRATED-CIRCUIT PRODUCTION WITH ELECTRON-BEAMS

被引：9
作者：
LIVESAY, WR [1 ]
机构：
[1] RADIANT ENERGY SYST,NEWBURY PK,CA 91320
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 06期
关键词：
D O I：
10.1116/1.1318459
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1028 / 1032
页数：5
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