INTEGRATED-CIRCUIT PRODUCTION WITH ELECTRON-BEAMS

被引：9

作者：

LIVESAY, WR ^{[1
]}

机构：

[1] RADIANT ENERGY SYST,NEWBURY PK,CA 91320

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 06期

关键词：

D O I：

10.1116/1.1318459

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1028 / 1032

页数：5

共 50 条

[1] SHAPED BEAMS FOR INTEGRATED-CIRCUIT FABRICATION
WEBER, EV
OPTICAL ENGINEERING, 1983, 22 (02) : 190 - 194
[2] SHAPED BEAMS FOR INTEGRATED-CIRCUIT FABRICATION
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PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1982, 333 : 94 - 97
[3] COUPLED MARX-TESLA CIRCUIT FOR PRODUCTION OF INTENSE RELATIVISTIC ELECTRON-BEAMS
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[4] PRODUCTION OF INTENSE MICROSECOND RELATIVISTIC ELECTRON-BEAMS
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[5] INTEGRATED-CIRCUIT DIAGNOSIS USING FOCUSED ION-BEAMS
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[6] MICROWAVE PRODUCTION WITH INTENSE RELATIVISTIC ELECTRON-BEAMS
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[7] PRODUCTION OF ANNULAR ELECTRON-BEAMS BY FOILLESS DIODES
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[8] ELECTRON-BEAM LITHOGRAPHY FOR INTEGRATED-CIRCUIT FABRICATION
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PHYSICS IN TECHNOLOGY, 1980, 11 (05): : 169 - 174
[9] INTEGRATED-CIRCUIT DEBUGGING USING ELECTRON-BEAM
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ANNALES DES TELECOMMUNICATIONS-ANNALS OF TELECOMMUNICATIONS, 1988, 43 (7-8): : 443 - 459
[10] ELECTRON-BEAM WELDING INTEGRATED-CIRCUIT CASES
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