CHEMICAL-VAPOR-DEPOSITION OF COPPER FOR ADVANCED ON-CHIP INTERCONNECTS

被引：28

作者：

GELATOS, AV

JAIN, A

MARSH, R

MOGAB, CJ

机构：

[1] UNIV NEW MEXICO,ALBUQUERQUE,NM 87131

[2] MOTOROLAS ADV PROD RES & DEV LAB,AUSTIN,TX

来源：

MRS BULLETIN | 1994年 / 19卷 / 08期

关键词：

D O I：

10.1557/S0883769400047734

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：49 / 54

页数：6

共 22 条

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