GROWTH-MORPHOLOGY AND THE EQUILIBRIUM SHAPE - THE ROLE OF SURFACTANTS IN GE/SI ISLAND FORMATION

被引:217
作者
EAGLESHAM, DJ
UNTERWALD, FC
JACOBSON, DC
机构
[1] AT and T Bell Laboratories, Murray Hill, NJ 07974
关键词
D O I
10.1103/PhysRevLett.70.966
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Surface energy anisotropy, as opposed to surface energy, is shown to influence changes of growth mode in Ge/Si by ''surfactant'' impurities. By annealing thin Ge/Si films, we find the equilibrium island shape, and hence the surface energy anisotropy; radical changes in shape are seen for impurity-terminated surfaces: Ge:Sb enhances (100) facets compared to clean Ge and Ge:In favors {311}. Thus Sb impurities favor large flat islands which would lead to earlier island coalescence and can aid planar (100) growth, while In (though otherwise a good ''surfactant'') leaves the film faceted. Island suppression by a ''morphactant'' thus depends on enhanced faceting onto (100), as well as reduced diffusion.
引用
收藏
页码:966 / 969
页数:4
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