OPTICAL IMAGING APPLIED TO MICROELECTRONIC CHIP-TO-CHIP INTERCONNECTIONS

被引:98
作者
KOSTUK, RK
GOODMAN, JW
HESSELINK, L
机构
来源
APPLIED OPTICS | 1985年 / 24卷 / 17期
关键词
D O I
10.1364/AO.24.002851
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:2851 / 2858
页数:8
相关论文
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