LAMBDA/4-SHIFTED INGAASP INP DFB LASERS BY SIMULTANEOUS HOLOGRAPHIC EXPOSURE OF POSITIVE AND NEGATIVE PHOTORESISTS

被引:72
作者
UTAKA, K
AKIBA, S
SAKAI, K
MATSUSHIMA, Y
机构
[1] KDD, Research & Development Lab,, Tokyo, Jpn, KDD, Research & Development Lab, Tokyo, Jpn
关键词
D O I
10.1049/el:19840686
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
LASERS, SEMICONDUCTOR
引用
收藏
页码:1008 / 1010
页数:3
相关论文
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