A SIMPLE-MODEL FOR SEPARATING INTERFACE AND OXIDE CHARGE EFFECTS IN MOS DEVICE CHARACTERISTICS

被引:119
作者
GALLOWAY, KF [1 ]
GAITAN, M [1 ]
RUSSELL, TJ [1 ]
机构
[1] NBS,DIV SEMICOND DEVICES & CIRCUITS,GAITHERSBURG,MD 20899
关键词
D O I
10.1109/TNS.1984.4333537
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1497 / 1501
页数:5
相关论文
共 22 条
[1]   MOS MODELING HIERARCHY INCLUDING RADIATION EFFECTS [J].
ALEXANDER, DR ;
TURFLER, RM .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1975, 22 (06) :2611-2616
[2]   ROLE OF SCATTERING BY SURFACE-ROUGHNESS IN SILICON INVERSION LAYERS [J].
CHENG, YC ;
SULLIVAN, EA .
SURFACE SCIENCE, 1973, 34 (03) :717-731
[3]   EFFECT OF COULOMB SCATTERING ON SILICON SURFACE MOBILITY [J].
CHENG, YC ;
SULLIVAN, EA .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (01) :187-192
[4]  
FEIGL FJ, 1983, VLSI ELECTRONICS, V6, pCH2
[5]  
GAITAN M, 1984 IEEE NSRE C
[6]   ELECTRON-SCATTERING IN SILICON INVERSION LAYERS BY OXIDE AND SURFACE-ROUGHNESS [J].
HARTSTEIN, A ;
NING, TH ;
FOWLER, AB .
SURFACE SCIENCE, 1976, 58 (01) :178-181
[7]   RELATIONSHIP BETWEEN MOSFET DEGRADATION AND HOT-ELECTRON-INDUCED INTERFACE-STATE GENERATION [J].
HSU, FC ;
TAM, S .
IEEE ELECTRON DEVICE LETTERS, 1984, 5 (02) :50-52
[9]  
MULLER RS, 1977, DEVICE ELECTRONICS I, pCH8
[10]  
NICOLLIAN EH, 1982, MOS PHYSICS TECHNOLO, pCH11