ATOMIC LAYER-BY-LAYER ENGINEERING OF HIGH T(C) MATERIALS AND HETEROSTRUCTURE DEVICES

被引：36

作者：

ECKSTEIN, JN

BOZOVIC, I

VIRSHUP, GF

机构：

来源：

MRS BULLETIN | 1994年 / 19卷 / 09期

关键词：

D O I：

10.1557/S0883769400047989

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：44 / 50

页数：7

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