共 16 条
[1]
BYER RL, 1983, P SPIE XRAY LITHOGRA, P2
[2]
Byer RL, 1985, United State Patent, Patent No. [4,555,786, 4555786]
[4]
EGGLESTON JM, 1982, P SOC PHOTO-OPT INST, V335, P104
[6]
HOLZRICHTER JF, 1984, UCRL5002184 LAS PROG, P6
[7]
HULME GJ, 1975, SOC PHOTOOPT INSTR E, V69, P38
[9]
KANE TJ, 1982, J OPT SOC AM, V72, P1755
[10]
Koechner W., 1976, SOLID STATE LASER EN