FORMATION OF PERIODIC RING STRUCTURES OF RELIEF AND VOIDS UNDER LASER VAPOR-DEPOSITION OF METALLIC-FILMS

被引：7

作者：

BAGRATASHVILI, VN

BANISHEV, AF

GNEDOY, SA

EMELYANOV, VI

JERIKHIN, AN

MERZLJAKOV, KS

PANCHENKO, VY

SEMINOGOV, VN

机构：

[1] Technological Laser Research Center Shatura, Moscow Region

[2] Moscow State University, Moscow

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1991年 / 52卷 / 06期

关键词：

42.60.-v; 68.20.+t; 81.15Gh;

D O I：

10.1007/BF00323656

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The formation of periodic ring structures during laser-induced chemical vapor deposition of metals from metal carbonyl is observed experimentally and described by a theoretical model.

引用

页码：438 / 444

页数：7