FORMATION OF PERIODIC RING STRUCTURES OF RELIEF AND VOIDS UNDER LASER VAPOR-DEPOSITION OF METALLIC-FILMS

被引：7
|
作者：
BAGRATASHVILI, VN
BANISHEV, AF
GNEDOY, SA
EMELYANOV, VI
JERIKHIN, AN
MERZLJAKOV, KS
PANCHENKO, VY
SEMINOGOV, VN
机构：
[1] Technological Laser Research Center Shatura, Moscow Region
[2] Moscow State University, Moscow
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1991年 / 52卷 / 06期
关键词：
42.60.-v; 68.20.+t; 81.15Gh;
D O I：
10.1007/BF00323656
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The formation of periodic ring structures during laser-induced chemical vapor deposition of metals from metal carbonyl is observed experimentally and described by a theoretical model.
引用
收藏
页码：438 / 444
页数：7
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