THE SOURCES FOR CONTAMINANTS IN THE TRACE ANALYSIS OF CARBON IN GAAS BY SECONDARY ION MASS-SPECTROMETRY

被引：22

作者：

KOBAYASHI, J

NAKAJIMA, M

ISHIDA, K

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 01期

关键词：

D O I：

10.1116/1.574974

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：86 / 92

页数：7

共 13 条

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