THE ADSORPTION AND DECOMPOSITION OF MOLYBDENUM HEXACARBONYL ON MO AND SI SURFACES

被引：18
作者：
CHO, CC
BERNASEK, SL
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词：
D O I：
10.1116/1.574832
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1088 / 1090
页数：3
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