CHROMIUM FILM DEPOSITION FROM GAS-PHASE

被引：0
|
作者：
DEVYATYKH, GG
VLASOV, SM
MAZAVIN, SM
机构：
来源：
RUSSIAN METALLURGY | 1974年 / 02期
关键词：
D O I：
暂无
中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
摘要：
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页码：56 / 58
页数：3
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